A Poly-Si-Based Vertical Comb-Drive Two-Axis Gimbaled Scanner for Optical Applications

This work presents a novel two-axis gimbaled mirror for optical scanning applications. This scanner has been implemented using the molded surface-micromachining and bulk etching release (MOSBE II) process. Thus, the vertical comb-drive actuators are employed to realize the large stroke. The thin-film electrical routings are employed to drive the actuators individually. The rib-reinforced structures are exploited to increase the stiffness of mirror plate and supporting frame. In addition, the moving space created by backside deep reactive ion etching enables the mirror to perform large out-of-plane angular motion. The measured radius of curvature of reinforced mirror plate is 0.43 m. The maximum scanning angle of two driving axis are plusmn3.8deg at 55 V and plusmn2.4deg at 100 V, respectively. The resonant frequencies associated with the scanning modes are 5.8 and 7.8m kHz, respectively. In addition, the two-dimensional scanning images such as Lissajous patterns are also demonstrated