Recent advances in metal-organic vapor phase epitaxy

Recent progress in the development and application of metal-organic vapor phase epitaxy (MOVPE) is reviewed. The formation of new and unique materials and structures, including wide-bandgap materials of both III-V and II-VI semiconductors, is discussed. The basic studies of the underlying chemistry and fluid flow behavior in MOVPE reactors and resulting improvements in the control of material properties and the uniformity of growth are considered. New growth precursors yielding both selective area growth and improved material purity are discussed. Improved reproducibility of the MOVPE growth product using growth monitors, for the real-time determination of film thickness and composition, which have resulted in greater acceptance of the MOVPE technique in the manufacturing environment, is discussed.<
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