Simulating Nuclear Events in a TCAD Model of a High-Density SEU Hardened SRAM Technology

The interaction between a heavy ion and the overlayer materials in an integrated circuit may result in a nuclear reaction. This reaction leads to a charge generation profile that is substantially altered from the profile generated during a direct ionization event. In this work, nuclear reactions are integrated into the modeling of the SEU response of an SRAM cell using GEANT4-based simulations. The simulated transient response is compared to the response obtained using a typical heavy ion model that includes only direct ionization