Optimal Resources Allocation for a Hybrid Material Handling System in a 300mm Wafer Fab

This paper addresses the issue of the optimal resources allocation of automated material handling systems (AMHS) and operators for a hybrid material handing system in a 300-mm wafer fab. The proposed methodology exploits the colored timed Petri nets (CTPN) to model the hybrid material handing system, and then the CTPN model is further transformed into a three-phase discrete event simulation model for the performance analysis of the system. The experiment design is conducted to simulate different scenarios and the response surface method is applied to obtain the optimal allocation of AMHSs and operators for each scenario