Uniform Long-Slit Microwave Plasma Generation From a Longitudinal-Section Electric Mode Coupling

A stable uniform long-slit atmospheric argon plasma is produced by coupling a longitudinal-section electric (LSE) mode in a dielectric-loaded rectangular waveguide. The microwave-induced plasma discharge system consists of a 2.45-GHz microwave source, a circulator, a three-stub tuner, a transformer, and a tapered rectangular waveguide loaded with two dielectric slabs. A uniform 98-mm-long atmospheric argon plasma is observed at a relatively low microwave power level of 350 W and a gas flow rate of 10-15 L/min