MUGFET - alternative transistor architecture for 32 nm CMOS generation

In this paper, the suitability of the MUGFET technology as an alternative device architecture for 32 nm CMOS generation is discussed. In particular, the requirements for the MUGFET devices with focus on FIN geometry, gate stack, and junctions are analyzed. Technological challenges related to the processing of MUGFET devices such as, FIN and gate patterning, junctions and spacer formation, are also presented