Robust control of an electrostatically actuated MEMS in the presence of parasitics and parametric uncertainties

Due to the compact layout, manufacturing tolerance, modeling errors, and environmental changes, micro-electromechanical systems (MEMS) are subjected to parasitics and parameter variations. In order to better guarantee their stability and a certain level of performance, one must take into account these factors in the design of MEMS control systems. This work presents two robust control laws for a parallel-plate electrostatic micro-actuator in the presence of uncertainties. The dynamical model of the system is firstly established and two control schemes, both based on input-to-state stabilization (ISS) and robust backstepping, are proposed. The stability and performance of the system using these control schemes are demonstrated through both stability analysis and numerical simulation.