Size effect in micro and nano structures

This paper presents an analytical model for the size effect in rectangular cross-section metal wires based on a solution to the Boltzmann transport equation (BTE). The results are verified with the solution at the limiting cases of thin film and square cross section wire with various specular reflection coefficients at the film boundaries and agree well. In addition, a simple model was developed that can be conveniently used to approximate the exact solution of the BTE. These results can be used for the predictions of the electrical resistance and/or thermal conductivity of the metal as well as semiconductor nanostructures