High-silica guided-wave optical devices

A high-silica embedded channel waveguide with low loss and high precision structure has been fabricated using low-temperature glass formation, lithography, reactive ion etching, and a flame hydrolysis glass deposition processes. Fusion splicing of the waveguide and single-mode fiber has also been achieved by CO/sub 2/ laser beam irradiation. Furthermore, this waveguide structure can be applied to many devices such as multi/demultiplexers, star couplers, and hybrid integration of optical active components.<
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