The response of a microwave multipolar bucket plasma to a high-voltage pulse with finite rise time

A collisional model that describes the response of a microwave multipolar bucket plasma to a high-voltage pulse with finite risetime has been developed for plasma immersion ion implantation (PIII). The agreement between this model and the measurements of the sheath position and target current in a 100 mtorr helium plasma is found to be much improved when the risetime of the pulse and the ion energy distribution during the PIII process is considered.<
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