MEMS on/off and 1/spl times/2 optical switch with integrated fiber alignment capability

An on/off free space optical switch is described in this paper. The device consists of intersecting cantilevers and is electrostatically actuated. A fiber is put onto the cantilevers and by controlling the position of the fiber through actuation, switching operation can be achieved. The device is also suitable for in-package fiber alignment application, where the cantilevers can be used as passive or active fiber alignment microstructure.