Highly sensitive thin film magnetoresistive sensor with good linearity

A linear magnetoresistive (MR) sensor that does not need a bias magnetic field was developed by using permalloy thin film. The barber-pole structure was adopted, and values were calculated using the boundary-element method to design conductor patterns that give a symmetrical output. The film construction and manufacturing process are carefully examined. A highly sensitive MR sensor with good linearity, no hysteresis, and good temperature characteristics is realized.<
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