On-chip solenoid inductors with high quality factor for high frequency magnetic integrated circuits

On-chip solenoid inductors for high frequency magnetic integrated circuits are proposed. The eddy current loss was reduced by dividing the inductor into three consecutive inductors connected in series. The inductor has an inductance of 1.1nH and the maximum quality factor (Q/sub max/) of 50.5. The self-resonant frequency and the operating frequency at Q/sub max/ are greater than 17.5GHz and 16.7GHz, respectively.