A 3/spl times/3, K-band CPW-fed, aperture-coupled antenna array for radiometer applications

A 3/spl times/3 CPW-fed, aperture-coupled patch antenna array operating at 20.7 GHz has been designed, fabricated and measured for this work. Conventional silicon processing and micromachining methods were used to fabricate the dual-substrate structure. S-parameter and pattern measurements were performed to demonstrate the antenna and feed network performance at 20.7 GHz.