Amorphous silicon two-color microbolometer for uncooled IR detection

This paper describes the modeling and design of two-color microbolometers for uncooled infrared (IR) detection. The goal is to develop a high resolution IR detector array that can measure the actual temperature and color of an object based on two spectral wavelength regions. The microbolometer consists of high temperature amorphous silicon (a-Si:H) thin film layer held above the substrate by Si/sub 3/N/sub 4/ bridge. A thin NiCr absorber with sheet resistance of 377 /spl Omega//sqr is used to enhance the optical absorption in the medium and long IR wavelength windows. A tunable micromachined Al-mirror was suspended underneath the detector. The mirror is switched between two positions by the application of an electrostatic voltage. The switching of the mirror between the two positions enables the creation of two wavelength response windows, 3-5 and 8-12 /spl mu/m. A comparison of the two response wavelength windows enables the determination of the actual temperature of a viewed scene obtained by an IR camera. The microbolometer is designed with a low thermal mass of 1.65/spl times/10/sup -9/ J/K and a low thermal conductance of 2.94/spl times/10/sup -7/ W/K to maximize the responsivity R/sub v/ to a value as high as 5.91/spl times/10/sup 4/ W/K and detectivity D/sup */ to a value as high as 2.34/spl times/10/sup 9/ cm Hz/sup 1/2//W at 30 Hz. The corresponding thermal time constant is equal to 5.62 ms. Hence, these detectors could be used for 30-Hz frame rate applications. The extrapolated noise equivalent temperature difference is 2.34 mK for the 8-12 /spl mu/m window and 23 mK for the 3-5 /spl mu/m window. The calculated absorption coefficients in the medium and long IR wavelength windows before color mixing are 66.7% and 83.7%. However, when the color signals are summed at the output channel, the average achieved absorption was 75%.