Capacitance characterization method for thick-conductor multiple planar ring structures on multiple substrate layers

A capacitance characterization method for thick-conductor multiple planar ring structures on multiple substrate layers has been made by extending the rectangular boundary division method. The region to be considered in the analysis is divided into subregions of thick-wall cylindrical tubes in each of which Laplace's equation is solved by the method of the separation of variables. A special application scheme of the boundary conditions is devised to decrease the number of necessary equations. Numerical results are shown for circular disk and planar ring structures in comparison with other available data.<
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