Improved AFM Scanning Methodology with Adaptation to the Target Shape

This paper presents a manipulation and measurement aid for tasks carried out in micro-nano environments operating with scanning AFM. In teleoperated manipulation or measurement over a given point of the target, where a slow and precise movement is necessary, the developed system increases the accuracy in this point producing a space deformation. In automatic scanning, the adjusted selection of the target, through assisted image segmentation, enables to reduce the working time.