A bi-stable micro-machined switch employing three magnets

A new electromagnetic micro-machined switch structure is presented with two (on, off) stable states. These states can be maintained without any current in the actuating coil, thus reducing joule losses. The switch can be implemented either in silicon or using a modified high-density interconnect (HDI) process, thus providing higher voltage isolation in the off-state while providing higher current handling in the on-state. The switch structure is particularly well suited for circuit breaker and relay applications.