Electro-thermal Simulations of Nanoscale Transistors with Optical and Acoustic Phonon Heat Conduction

In order to take into account the nanoscale heat generation and phonon heat conduction, the optical and acoustic phonon temperature system for TCAD simulation is developed and self-consistently coupled with the hydrodynamic transport model. This electrothermal model is validated through the simulations of a thin-body SOI NMOSFET.