An experimental study on SF/sub 6/ gas decomposition by high-voltage pulsed discharge

In this work, an application of non-thermal plasma to one of the sulfur hexafluoride (SF/sub 6/) decomposition method is experimentally investigated. A high-voltage pulsed power with a faster rise-time is used to generate the non-thermal plasma of a simple silent-type discharge reactor. The SF/sub 6/ decomposition rate obtained from the experiments is characterized as an effect of inputted electric energy on the chemical reaction, and discussed in a decomposition reaction rate. In addition, a chemical treatment for some by-products of decomposed SF/sub 6/ is experimentally conducted with calcium oxide (CaO) in a high binding effect on halogen products. This paper shows the experimental results of SF/sub 6/ decomposition characteristics with the inputted energy effect on the reaction rate and the effective approach for the toxic by-product treatment.