Widely tunable and highly selective monolithic Fabry-Perot filter for dense WDM systems

We report the design and fabrication of highly selective and widely tunable filters. The design of the micro-mechanical structure ensures a stable resonator geometry under actuation that provides constant performance in terms of selectivity (FWHM < 0.5 nm) throughout the entire tuning range of 130 nm. The devices are micro-machined from a monolithic, all epitaxial InP/InGaAs structure that can be integrated with an InP-based photo detector or emitter in a low-cost component for wavelength division multiplexing systems operating in the 1.3 or 1.55 /spl mu/m band.