Design and fabrication of MEMS optical modulators integrated with PHC waveguides

We report the design and fabrication process of MEMS actuators for optical attenuators integrated with two-dimensional photonic crystal waveguide. Fabrication process has been improved from our previous model such that the SOI PhC layer is not delaminated during the sacrificial release in HF. The device was successfully developed and optically tested to obtain 2 dB modulation contrast at an 86 V with -27 dB insertion loss