Hybrid Control of Vision and Force for MEMS Assembly System

In this paper we present a MEMS assembly system under hybrid control of vision and force feedback. The construction of micro-vision system is introduced in detail and a new micro-force sensor was developed. The strategies of integrating force and vision feedback have been investigated experimentally and impact experimental results are presented. A task of pin in hole of Φ0.1mm was completed. Using force feedback alone, two or more times of searching steps are needed. While based on the hybrid control of micro-vision and micro-force feedback, one searching step is enough.