Fabrication of L1/sub 0/-FePt thin films by rapid thermal annealing

Fabrication of L1/sub 0/-FePt thin films by using conventional thermal annealing and indirect rapid thermal annealing is studied. By using conventional thermal annealing, L1/sub 0/-FePt thin films are fabricated over 500/spl deg/C. By using the rapid thermal annealing, it was found that the formation temperature of L1/sub 0/-FePt thin films decreases effectively. In addition, this method enables to prevent the grain growth due to annealing.