Preparation and characterization of Mn-Ir/Fe-Si exchange-coupled multilayer film with Ru underlayer for high-frequency applications

Fe-Si magnetic film and Mn-Ir/Fe-Si exchange-coupled film with an Ru underlayer were fabricated and evaluated. Both coercivity and anisotropy dispersion were reduced due to the Ru underlayer effect on the magnetic properties of Fe-Si magnetic film and Mn-Ir/Fe-Si exchange-coupled film. Even in the Mn-Ir/Fe-Si exchange-coupled multilayer film with an Ru underlayer, the coercivity of the upper Fe-Si layer was reduced.