CD SEM calibration to TEM for accurate metrology of fins in MuGFET devices

We describe a procedure to calibrate CD SEM to TEM for accuracy. This goal is achieved by using 4 CD reference standards in the range 10-70 nm. After calibration, the CD SEM demonstrated sensitivity to process variation down to 10 nm. The accuracy of the CD SEM measurements on fins of MuGFET devices was confirmed by TEM analysis.