Micromachined silicon microstructures for gas sensors

Devices studied in this work consist of monocrystalline silicon micromachined cantilevers, obtained through the bulk micromachining of a BESOI (back etch silicon on insulator) wafer. Cantilevers are functionalized by means of a sensitive polymer layer. These devices have been employed in the detection of volatile organic compounds (VOCs) through different transduction principles. State-of-the-art sensitivities have been obtained.