Effect of extrinsic impedance and parasitic capacitance on figure of merit of RF MOSFET

This paper investigates the impact of source/drain impedance, gate-to-bulk capacitance, and gate resistance on device properties from 0 to 50 GHz for 0.13-/spl mu/m MOSFETs. Better device characteristics (g/sub m/ and C/sub gg/) can be found on MOSFETs with lower metal (or source/drain) resistance. But the best frequency characteristics (f/sub T/ and f/sub max/) occurred on MOSFETs with medium metal (or source/drain) resistance due to the increased interconnection capacitances. For radio frequency MOSFETs with finger-gate structure, better high-frequency behavior occurred on devices with medium finger-gate width W/sub f/ because of the tradeoff between gate (or source/drain) resistance and parasitic capacitance.