Thin palladium membrane microreactor with porous silicon support and their application in hydrogenation reaction

The authors have microfabricated a MEMS (micro electro mechanical system) based thin palladium (Pd) membrane microreactor with oxidized porous silicon (PS) support. The hydrogen flux through the Pd membrane with a thickness of 340 nm was 0.112 mol m/sup -2/s/sup -1/ at 250 /spl deg/C and a partial pressure difference of 110 kPa. H/sub 2//N/sub 2/ and H/sub 2//He selectivity was about 46 and 10 at 250 /spl deg/C, respectively. The thermal isolation of the Pd membrane, which was heated by an integrated microheater, was realized by using the oxidized PS. The authors also carried out the hydrogenation of 1-butene at 250 /spl deg/C using the developed microreactor.