Toxic gas response of (In,Sn)O/sub 2//Pt nanowire sensors

Thin film gas sensors based on tin oxide are fabricated and its characteristics are examined. Target gases are dimethyl methylphosphonate(C/sub 3/H/sub 9/O/sub 3/P, DMMP) as a simulant gas for nerve gas GA (Tabun) and acetonitrile (CH/sub 3/CN) as a simulant gas for blood gas. Sensing materials are Pt/SnO/sub 2/, where Pt layer (30 /spl Aring/) is deposited on tin oxide film grown on alumina substrate, (Sn,In)O/sub 2//Pt and SnO/sub 2//Pt, where (Sn,In)O/sub 2/ and tin oxide films are deposited on Pt layer (30 /spl Aring/) grown on alumina substrate, respectively. In the latter two sample have a nano-wire structure grown over thin film. The thickness of nano-wire is /spl sim/ 60 nm. Nano-wire sensors grown on thin film show high sensitivity and stability to DMMP and CH/sub 3/CN. We display the results compared that of nano-wire with ordinary tin oxide sample.