A new electrical recording neural probe integrated with chemical stimulation

This paper presents an integrated neural probe that can be used as a neural signal recorder as well as a chemical stimulator. The single unit integrated probe features in-plane shanks with buried microchannels and low impedance microelectrodes. The fabricated neural probe has three 3 mm-long shanks with a 10 /spl mu/m-diameter microchannel and six 30 /spl mu/m /spl times/ 30 /spl mu/m square gold microelectrodes per shank. The measured impedance magnitude and the phase shift of the microelectrodes are 23.1 k/spl Omega//900 /spl mu/m/sup 2/ and 52.9/spl deg/ at 1 kHz, respectively.