Novel pattern transfer technique on flexible polymer structure for advanced microfluidic systems

In this paper, a new pattern transfer technique into a flexible polymer structure is presented. Au and Cu micro patterns are transferred to a polydimethylsiloxane (PDMS) sheet through a lift-off method. Alkylsilane and alkanethiol SAMs are used for the surface modification to form an anti-adhesive layer or an adhesive layer, respectively. As a result, various types of Au and Cu patterns are transferred to a PDMS substrate successfully. The stability of the patterns on the PDMS sheet is confirmed by a simple scratch test of the surface. In addition, the experimental results under the various conditions will be shown.