System integration of high voltage electrostatic MEMS actuators

A system integration for high voltage (HV) electrostatic microelectromechanical systems (MEMS) actuators is introduced on a micro-printed circuit board (PCB). The system includes a programmable microcontroller, a programmable DC/DC converter, a multi output HV interface and electrostatic MEMS actuators. The system produces high output voltages (10-300V) and can control a large variety of MEMS capacitive loads (1 to 50pF) by combining diverse technologies. This system proves that technologies, such as low voltage CMOS of different processes, high voltage DMOS and MEMS, can interact, communicate and even be integrated as a system in package (SIP), providing significant size and cost reductions.