A MEMS 1D optical scanner for laser projection display using self-assembled vertical combs and scan-angle magnifying mechanism

We report a novel one-axis MEMS (micro electro mechanical systems) optical scanner for laser projection displays with a scan-angle magnifying mechanism based on a 2-DOF (degrees of freedom) vibration system. Small angular motion (3/spl deg/) created by the self-assembled electrostatic vertical-comb drive actuator was amplified through the two-mass-two-spring vibration mechanism, and a large scan angle of mirror (30/spl deg/) was obtained with 140 Vpp at the first resonant frequency (22.3 kHz).