Design and fabrication of a pure-rotation microscanner with self-aligned electrostatic vertical combdrives in double SOI wafer

This paper describes a microscanner actuated by self-aligned electrostatic vertical combdrives. A tilt motion without unwanted vertical or lateral piston motions of a mirror, namely, a pure-rotation is very important for a scanning device for high resolution. We have designed and fabricated a pure-rotation microscanner in double SOI wafer actuated by self-aligned vertical electrostatic combdrives, and measured the characteristics. The design of the comb electrodes makes it possible to produce the tilt motion of the microscanner without piston motions. The static optical deflection angle of the device was measured as 7.6 degrees at 150V/sub dc/. The resonant frequency was found to be 660Hz.