Electrical properties of SBT capacitor with top electrodes

The Sr/sub 0.8/Bi/sub 2.2/Ta/sub 2/O/sub 9/ (SBT) thin films are deposited on Pt-coated electrode (Pt/TiO/sub 2//SiO/sub 2//Si) using RF magnetron sputtering method. The electrical properties of SBT capacitors with top electrodes were studied. In the XRD pattern, the SBT thin films in all annealing temperatures had (105) orientation. In the SEM images, bi-layered perovskite phase was crystallized at 750 /spl deg/C and grains largely grew in oxygen annealing atmosphere. The electrical properties of SBT capacitor with top electrodes represents a favorable properties in Pt electrode. The maximum remanent polarization and the coercive electric field with Pt electrode are 12.40/spl mu/C/cm/sup 2/ and 30 kV/cm respectively. The dielectric constant and leakage current density with Pt electrode is 340 and 6.81 x 10/sup -10/ A/cm/sup 2/ respectively.