High-temperature thermal converter based on thin film Ge-Sb-V/TiSi/sub 2/ thermocouples

In this paper the applicability of magnetron sputtered Ge-Sb-V/TiSi
₂
thermocouples in thermal converter construction has been analysed and described. Testing device with linear symmetry was prepared on 10times10 mm
²
D263 Schott foil glass substrates 7 mum thick. The converter contained the MoSi
₂
heater and the integrated thermopile based on 2times6 "hot" and "cold" junctions of silicide/semiconductor type. The Ge-Sb-V alloy with various content of V was examined. Thermal sensitivity of thermocouples was varied from 160 to 224 muV/K. The performance of these converters in ambient temperature range of 300-773 K under normal pressure has been evaluated and reported