Micro flow sensor and integrated magnetic oxygen sensor using it

A thermal micro mass flow sensor was developed. A micro bridge heater was fabricated by micromachining. The sensor has high sensitivity and quick response because of its small thermal capacity and small thermal time constant. Micro bridge differential heaters were used to detect mass flow in a small flow range. An integrated magnetic oxygen sensor was fabricated using the micro thermal flow sensor. The flow sensor and the micro valve will be applied in integrated gas control systems.<
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