Sensitivity distribution measurement of sensor element for the solid-state imager

A new method for measuring the sensitivity distribution of the picture element of the solid-state imager was proposed. The method can display the distribution on an oscilloscope, and high accuracy is attained by the optical system using a narrow-slit pattern and a high resolution projection lens. Theoretical analysis on the measurement error was also performed. The developed method will be an important tool for the precise evaluation of the resolution characteristics of the solid-state imager.