Digital NMOS test circuits fabricated in silicon MBE

Integrated digital test circuits, as well as discrete NMOS devices, have been fabricated in epitaxial layers produced by silicon molecular-beam epitaxy (Si-MBE). The performance of these circuits and devices was found to be very similar to that of identical components processed in standard substrates. Unusually high low-field mobility was measured in the MBE MOSFET's.