FIPOS (Full Isolation by Porous Oxidized Silicon) technology and its application to LSI's

Processing steps of FIPOS (Full Isolation by Porous Oxidized Silicon) technology and its application to LSI's are presented, FIPOS technology realizes a silicon-on-insulator structure, utilizing thick porous oxidized silicon and donors produced by proton implantation. New processing steps are proposed which provides small surface step and are suitable for LSI fabrication. Formation conditions of thick porous oxidized silicon are established by density control technique for porous silicon using a newly developed anodization system. CMOS devices are fabricated in isolated silicon layers and it is shown that the characteristics of n-channel and p-channel MOSFETS's are sufficient for application to CMOS LSI's. A FIPOS/CMOS logic array with 1.3K gate is successfully fabricated, which shows a higher speed and lower power dissipation than the gates fabricated by bulk CMOS technology. These results indicate that FIPOS technology is very useful for realizing high-performance CMOS LSI's.