N-channel enhancement-mode MOSFET characteristics from 10 to 300 K

Operation of MOSFET circuits at the liquid nitrogen temperature (77 K) has been suggested as a means of improving circuit and system performance. Previously reported work emphasizes mobility and threshold voltage at 77 K. However, small MOSFET's require several (≳10) parameters for circuit design. Since a full set of MOSFET model parameters have not been previously reported, it has not been established whether conventional models can be applied for MOSFET circuit design at 77 K. We present here the temperature dependence of a full set of MOSFET circuit model parameters for channel lengths from 2.5 to 8.5 µm and for temperatures ranging from 10 to 300 K. Temperatures below 77 K are of interest in evaluating effects of impurity freezeout and temperatures above 77 K are important since actual device temperatures will be above the ambient. Overall, we find that the mobility and the threshold voltage are the dominant temperature dependent parameters and that conventional I-V characteristics persist down to 77 K. Below 77 K, some new features appear in the I-V characteristics. However, the conventional behavior down to 77 K suggests that standard (circuit models can be used for circuits operating at 77 K. Such circuits would be about four times faster than at room temperature and, with liquid nitrogen cooling, would provide an order of magnitude higher power density for VLSI.