Correction of differential capacitance profiles for Debye-length effects

Conventional differential capacitance-voltage (
C-V
) profiling methods are limited in resolution by the method used to convert
C-V
data to profile data. A new method of numerical calculation of
C-V
data, using cubic finite elements, is presented which allows a more exact relationship between
C-V
data and profile data to be calculated. This new method of data reduction allows the resolution of differential
C-V
profiling method to be extended to dimensions near the local extrinsic Debye length.