Micromachined microwave actuator (MIMAC) technology-a new tuning approach for microwave integrated circuits

The authors describe a novel approach to the realization of tunable/variable III-V planar microwave integrated circuits, which uses micromachined electrostatically controlled actuator technology. This technology is potentially compatible with conventional MMIC (monolithic microwave integrated circuit) fabrication techniques, and allows precise positioning and re-positioning of metal conductors on an insulating substrate after fabrication is complete. A variety of structures has been fabricated, including electrostatic micro-motors, rotating microwave switches, and variable interdigitated capacitors. A rotating microwave transmission line switch exhibited less than 0.5 dB insertion loss and greater than 35 dB isolation from DC to 45 GHz. A variable interdigitated capacitor exhibited a variation from 35 fF to 100 fF.<
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