Tunnel magnetoresistance in magnetic tunnel junctions with a disordered Co/sub 2/(Cr/sub 1-x/Fe/sub x/)Al full-Heusler alloy film

The structural properties of Co/sub 2/(Cr/sub 1-x/Fe/sub x/)Al annealed at various temperatures and prepared on heated substrates are demonstrated. The TMR properties of MTJs with the disordered Co/sub 2/(Cr/sub 1-x/Fe/sub x/)Al is also shown. Magnetoresistance measurement of the MTJs was performed by using a four-point probe technique. Film structures and oxidization at surfaces and interfaces were characterized by using X-ray diffraction (XRD) (Cu-K/spl alpha/) and X-ray photoelectron spectroscopy (XPS) (Al-K/spl alpha/), respectively.