Recoiled particle irradiation effects to RE-TM films around compensation point observed by ferromagnetic Hall effect

The perpendicular magnetization characteristics of Gd/sub x/(Fe/sub 90/Co/sub 10/)/sub 1-x/ and Tb/sub x/(Fe/sub 90/Co/sub 10/)/sub 1-x/ around their compensation point was measured by the ferromagnetic Hall measurement since the Hall measurement has a sufficient sensitivity to observe magnetization characteristics of very thin films with low saturation magnetization. Gd/sub x/(Fe/sub 90/Co/sub 10/)/sub 1-x/ thin films were deposited by ion beam sputtering using either Ar or Kr gas to investigate the effects of recoiled particles. Ion irradiation effects were also investigated using dual ion beam sputtering technique.