Fabrication and evaluation of thermal nano-sensor by focused-ion-beam chemical-vapor-deposition

Focused-ion-beam chemical-vapor-deposition (FIB-CVD) is a very useful to make 3D nanostructures and can be applied to make various nanodevices such as nano-sensors. So far, it has been reported that temperature nano-sensor was made by electron-beam(EB-CVD) using Pt source gas material.1) This time, we produced W thermal nano-sensor with 3D nanostructure by FIB-CVD using W(C0)s source gas material. The resistivity of W deposited by FBI-CVD is about 100 higher than that of bulk W at 25"C.The temperature measurement using nano-sensor is based on the change of electrical resistivity with temperature.