Current measurement of mechanically stretched nanowire with transmission electron microscope direct observation

Opposing electrodes with integrated micro-actuators were fabricated by bulk micromachining. The distance between the electrodes was precisely controlled by displacing the movable electrode by open-loop voltage control. The movable one approached to th fixed one, and finally the electrodes are brought into contact and bonded. The bonded electrodes were mechanically stretched to form a nanowire until they were broken. All the series of operations were directly observed by transmission electron microscope (TEM) with NTSC TV system. The current between the electrodes were monitored with 1 V bias voltage between the electrodes.