Nanoirnprint of glass materials with glassy carbon mold fabricated by focused-lon-beam etching

Micro/Nano imprinting or hot embossing is a target of interest for industrial production of micro and Nano devices. In Fluidic MEMS (Micro Electromechanical Systems) applications, polymer materials have been employed for their low cost to fabricate the economical products. However glasses are much more suitable for the higher temperature applications or strong chemical environments. In Optical MEMS as well, glasses are good candidate materials for better optical properties. In this study, Micro/Nano imprinting was employed for Pyrex glass and Quartz glass molding and the test structures were successfully fabricated with good fidelity of 10x10~7 μm and 0.3 μm line and space and 0.4 μm depth.