A novel depletion-gate amorphous silicon thin-film transistor

A novel type of amorphous silicon (a-Si) thin-film transistor (TFT) in which a depletion gate is added to the top of the second nitride layer of a conventional a-Si TFT has been fabricated. In this transistor, switching is done by the depletion gate instead of the accumulation gate as in conventional a-Si TFTs. The pinch-off voltage and ON-OFF current ratio of the transistor can be changed by the accumulation gate bias. The transistor exhibits high ON-OFF current ratio, low contact resistance, and low gate-source capacitance.<
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